Method of measuring volume of micro projection and method of applying liquid material

ABSTRACT

A method of measuring a volume of a micro projection includes: measuring a three-dimensional shape of the micro projection using white-light interferometry; comparing a height at which a first peak of an envelope of an interference light intensity is detected with a height of a reference plane, and extracting a projection top portion of the micro projection; detecting a height of the extracted projection top portion; detecting a diameter based on a lateral dimension and a longitudinal dimension of a circumscribed quadrangle in an area that constitutes the projection top portion and a region having a height different from the height of the reference plane, the region including or being in contact with the projection top portion; and calculating the volume of the micro projection based on the height of the projection top portion and the diameter.

TECHNICAL FIELD

The present invention relates to a method of measuring a volume of amicro projection and a method of applying a liquid material.

BACKGROUND ART

A method of detecting a height of an ink applied by an applicationapparatus is known. For example, according to Japanese PatentLaying-Open No. 2015-007564 (PTD 1), an application apparatus describedtherein positions an objective lens above an ink applied portion formedby an ink applied onto a surface of a substrate, and then, picks up animage with a Z stage being moved. For each of a plurality of pixelsforming the image obtained by image pick-up, the application apparatusdetermines a Z stage position where a contrast value peaks, and a heightof the ink applied portion based on the determined Z stage position.

CITATION LIST Patent Document

-   PTD 1: Japanese Patent Laying-Open No. 2015-007564

SUMMARY OF INVENTION Technical Problem

However, the contrast of the interference light in FIGS. 7(a), 10 and 11of PTD 1 is high in a location such as a flat surface where the regularreflected light is obtained, and is low in a location such as aninclined surface where it is difficult to obtain the regular reflectedlight.

The application mechanism described in PTD 1 can apply a high viscosityink. In the case of a high viscosity ink, a contact angle between theapplied ink and a substrate is large, and thus, the regular reflectedlight is not obtained at an edge of the ink and no interference fringeoccurs. Therefore, the height cannot be detected in some cases. Thevolume calculation formula described in PTD 1 is an integral value ofthe height of the ink applied portion and is based on the premise thatthe height of the entire applied portion can be detected. Therefore,when the height of a part of the applied portion cannot be detected asdescribed above, it is difficult to calculate the volume.

Generally, a volume Vol of a spherical object can also be calculated inaccordance with the following formula (1), based on a radius and a topheight of the spherical object:

Vol=(⅙)π×hp×(3R ² +hp ²)  (1)

where hp represents the top height, and R represents the radius. Asdescribed above, in the case of a high viscosity ink, a contact angle islarge at an edge of the ink and no interference fringe occurs, and thus,the height cannot be detected in some cases. In such a case, radius Rcannot be obtained and volume Vol cannot be calculated in accordancewith the formula (1).

As described above, when an ink has a high viscosity and no interferencefringe occurs and thus a height of an entire applied portion cannot bedetected, a volume of a liquid droplet cannot be directly detected basedon image data showing a three-dimensional shape as described in thepatent document.

Accordingly, an object of the present invention is to provide a methodof measuring a volume of a micro projection and a method of applying aliquid material, which allow calculation of a volume of a liquid dropleteven when a height cannot be detected at an edge of the liquid droplet.

Solution to Problem

A method of measuring a volume of a micro projection in the presentinvention includes: measuring a three-dimensional shape of the microprojection using white-light interferometry; comparing a height at whicha first peak of an envelope of an interference light intensity isdetected with a height of a reference plane, and extracting a portionhigher than the reference plane as a projection top portion of the microprojection; detecting a height of the extracted projection top portion;detecting, as a diameter, any one of a lateral dimension, a longitudinaldimension, and an average of the lateral dimension and the longitudinaldimension of a circumscribed quadrangle in an area that constitutes theprojection top portion and a region having a height different from theheight of the reference plane, the region including or being in contactwith the projection top portion; and calculating the volume of the microprojection based on the height of the projection top portion and thediameter.

Preferably, the region having the height different from the height ofthe reference plane is a height-undetected portion including or being incontact with the projection top portion.

Preferably, the region having the height different from the height ofthe reference plane is a height-detected portion lower than thereference plane, the height-detected portion including the projectiontop portion.

Preferably, the detecting the height includes detecting a maximum heightof the projection top portion as the height of the projection topportion.

Preferably, the detecting the height includes detecting, as the heightof the projection top portion, an average height or a median value of ahighest portion of the projection top portion and a portion near thehighest portion.

Preferably, the micro projection is a liquid droplet adhering to asubstrate.

Preferably, the liquid droplet is formed on the substrate by any one ofan application needle, an ink jet and a dispenser.

A method of applying a liquid material in the present invention is anapplication method by causing a liquid material to adhere to a tipportion of an application needle, positioning the application needle ata predetermined position above an object, moving down and up theapplication needle and applying the liquid material onto the object, toform a liquid material layer made of the liquid material. The method ofapplying a liquid material includes: measuring a three-dimensional shapeof a micro projection using white-light interferometry; comparing aheight at which a first peak of an envelope of an interference lightintensity is detected with a height of a reference plane, and extractinga portion higher than the reference plane as a projection top portion ofthe micro projection; detecting a height of the extracted projection topportion; detecting, as a diameter, any one of a lateral dimension, alongitudinal dimension, and an average of the lateral dimension and thelongitudinal dimension of a circumscribed quadrangle in an area thatconstitutes the projection top portion and a height-undetected portionincluding or being in contact with the extracted projection top portionor a height-detected portion lower than the reference plane, theheight-detected portion including the detected projection top portion;calculating a volume of the micro projection based on the height of theprojection top portion and the diameter; and when the volume calculatedin the calculating the volume of the micro projection is smaller than athreshold value, repeatedly applying the liquid material until thenumber of times of application exceeds the specified number of times.

Advantageous Effects of Invention

According to the present invention, a volume of a liquid droplet can becalculated even when a height cannot be detected at an edge of theliquid droplet.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a perspective view showing an overall configuration of amicroscopic application apparatus 1 including the function of measuringa volume of a liquid droplet as a typical example of an embodiment ofthe present invention.

FIG. 2 is a perspective view showing a main portion of an observationoptical system 2 and an ink application mechanism 5.

FIGS. 3(A) to (C) show the main portion when viewed from an A directionin FIG. 2.

FIG. 4 is an arrangement diagram of optical elements of observationoptical system 2.

FIG. 5 is a flowchart showing a procedure for measuring the volume ofthe liquid droplet in the embodiment of the present invention.

FIG. 6 shows an envelope of the interference light intensity.

FIG. 7 is a flowchart showing a procedure for determining a position(height) of a Z stage 8 where the interference light intensity peaks,using a modulation contrast mi(x, y).

FIG. 8 is a flowchart showing a procedure for determining a position(height) of Z stage 8 where the interference light intensity peaks,using modulation contrast mi(x, y).

FIG. 9 shows N areas Si (i=1 to N) forming a reference plane in a heightimage H and an area A including a liquid droplet top.

FIG. 10 shows a top height hp of the liquid droplet.

FIGS. 11(A) to (C) show an image C, an image F and an image I.

FIG. 12 shows a volume Vol of the liquid droplet, top height hp of theliquid droplet, and a radius R of the liquid droplet.

FIG. 13 is a diagram for illustrating a pixel value f(x, y) and a pixelheight h(x, y) in a liquid droplet outer circumferential portion.

FIG. 14 is a diagram for illustrating pixel value f(x, y) and pixelheight h(x, y) in the liquid droplet outer circumferential portion whena surface of a substrate has a high reflectivity.

FIGS. 15(A) to (C) show an image C, an image F and an image I.

DESCRIPTION OF EMBODIMENTS

An embodiment of the present invention will be described hereinafterwith reference to the drawings.

[Overall Configuration]

FIG. 1 is a perspective view showing an overall configuration of amicroscopic application apparatus 1 including the function of measuringa volume of a liquid droplet as a typical example of an embodiment ofthe present invention.

Referring to FIG. 1, microscopic application apparatus 1 includes: anapplication head portion composed of an observation optical system 2, aCCD (Charge-Coupled Device) camera 3, a cutting laser device 4, an inkapplication mechanism 5, and a light source for ink curing 6; a Z stage8 configured to move the application head portion in a verticaldirection (Z-axis direction) with respect to a substrate 7 to be coated;an X stage 9 configured to have Z stage 8 mounted thereon and move Zstage 8 in an X-axis direction; a Y stage 10 configured to havesubstrate 7 mounted thereon and move substrate 7 in a Y-axis direction;a control computer 11 configured to control the total operation ofmicroscopic application apparatus 1; a monitor 12 configured to displayan image and the like taken by CCD camera 3; and an operation panel 13through which a command from an operator is input to control computer11.

Observation optical system 2 includes a light source for lighting andobserves a surface state of substrate 7 and a state of an ink applied byink application mechanism 5. An image observed by observation opticalsystem 2 is converted to an electric signal by CCD camera 3 anddisplayed on monitor 12. Cutting laser device 4 irradiates substrate 7with a laser beam through observation optical system 2 to remove a metalfilm and the like.

Ink application mechanism 5 applies an ink onto substrate 7 to form anelectrode and the like. Light source for ink curing 6 includes, forexample, a CO₂ laser and irradiates the ink applied by ink applicationmechanism 5 with a laser beam to cure the ink.

The configuration of microscopic application apparatus 1 is one example,and microscopic application apparatus 1 may have, for example, aconfiguration called “gantry style” in which Z stage 8 havingobservation optical system 2 and the like mounted thereon is mounted onX stage 9 and further X stage 9 is mounted on Y stage 10 and Z stage 8is movable in an X-Y direction. Microscopic application apparatus 1 mayhave any configuration as long as Z stage 8 having observation opticalsystem 2 and the like mounted thereon is movable in the X-Y directionrelative to substrate 7.

Next, an example of ink application mechanism 5 including a plurality ofapplication needles 18 will be described. FIG. 2 is a perspective viewshowing a main portion of observation optical system 2 and inkapplication mechanism 5. Referring to FIG. 2, observation optical system2 and ink application mechanism 5 include a movable plate 15, aplurality of (e.g., five) objective lenses 16 having differentmagnifications, and a plurality of (e.g., five) application units 17 forapplying inks of different colors.

Movable plate 15 is provided so as to be movable in the X-axis directionand in the Y-axis direction between a lower end of an observation lensbarrel 2 a of observation optical system 2 and substrate 7. In addition,five through holes 15 a corresponding to five objective lenses 16,respectively, are formed in movable plate 15.

Five through holes 15 a are fixed to a lower surface of movable plate 15at prescribed intervals in the Y-axis direction. Five application units17 are arranged so as to be adjacent to five objective lenses 16,respectively. By moving movable plate 15, desired application unit 17can be arranged above an application position.

FIGS. 3(A) to (C) show the main portion when viewed from an A directionin FIG. 2, and show the ink application operation.

Application unit 17 includes application needle 18 and an ink tank 19.

First, as shown in FIG. 3(A), application needle 18 of desiredapplication unit 17 is positioned above the application position. Atthis time, a tip portion of application needle 18 is immersed in an inkin ink tank 19.

Next, as shown in FIG. 3(B), application needle 18 is moved down, suchthat the tip portion of application needle 18 protrudes from a hole of abottom of ink tank 19. At this time, the tip portion of applicationneedle 18 has the ink adhering thereto.

Next, as shown in FIG. 3(C), application needle 18 and ink tank 19 aremoved down to bring the tip portion of application needle 18 intocontact with the application position, and the ink is thereby applied.

Thereafter, the main portion returns to the state shown in FIG. 3(A).

In addition to the foregoing, various techniques of ink applicationmechanism 5 including the plurality of application needles 18 are known,and thus, a detailed description will not be repeated. These techniquesare described in, for example, PTD 1 (Japanese Patent Laying-Open No.2009-122259) and the like. Microscopic application apparatus 1 can applya desired ink of the plurality of inks by using, for example, themechanism shown in FIG. 2 as ink application mechanism 5, and can applythe ink by using application needle 18 having a desired applicationdiameter, of the plurality of application needles 18.

A description has been given of the example in which the function ofmeasuring a volume of a liquid droplet is integrally incorporated intothe microscopic application apparatus including application needles 18.However, other mechanisms such as, for example, an ink jet and adispenser can also be used as a mechanism for applying a microscopicliquid droplet. In addition, as the function of measuring a volume of aprojection having a shape that forms a part of an almost sphere, thepresent invention may be incorporated into a three-dimensional shapemeasuring apparatus and the like using two-beam interference.Furthermore, as long as a projection has a shape that forms a part of analmost sphere, the present invention is applicable not only to theliquid droplet but also to a solid projection such as a microlens.

In addition, although ink application mechanism 5 including theplurality of application needles 18 in FIG. 2 is used in microscopicapplication apparatus 1 according to the present embodiment, the presentinvention is not limited to the ink application mechanism in FIG. 2 andthe means such as a dispenser and an ink jet that can apply a liquidmaterial in a spherical form may be used.

[Principle of Detecting Height]

Next, the principle of detecting a height of a liquid droplet will bedescribed.

A Mirau-type interference objective lens 39 is one type of two-beaminterference objective lens. By utilizing the characteristic that theinterference light intensity is maximized at a focal position ofMirau-type interference objective lens 39, an image of the interferencelight is obtained, with Z stage 8 being moved in the Z-axis directionrelative to substrate 7. For each pixel of a plurality of images, aposition of Z stage 8 in the Z-axis direction where the interferencelight intensity is maximized is determined, to thereby detect a heightof a liquid droplet. This method of measuring the height is suitable fordetecting a micro height of not more than several micrometers.

Mirau-type interference objective lens 39 separates the white lightemitted from the light source for lighting included in observationoptical system 2 into two beams, and irradiates a surface of an objectwith one of the two beams and irradiates a reference plane with theother beam, to thereby cause the light reflected from the surface of theobject and the light reflected from the reference plane to interferewith each other.

A white light source is used as the light source for lighting includedin observation optical system 2. In the case of using the white lightsource, the interference light intensity is maximized only at a focalposition of Mirau-type interference objective lens 39, unlike the caseof using a single wavelength light source such as a laser. Therefore,the white light source is suitable for measuring a height of a liquiddroplet.

FIG. 4 is an arrangement diagram of optical elements of observationoptical system 2. Mirau-type interference objective lens 39 includes alens 31, a reference mirror 32 and a beam splitter 33.

A filter 36 is provided in an emission portion of incident light source34 by a filter switching device 35.

When the light emitted from incident light source 34 passes throughfilter 36, the white light having a center wavelength of λ (nm) isobtained.

The light having passed through filter 36 is reflected in a direction oflens 31 by a half mirror 37. The light having entered lens 31 is dividedby beam splitter 33 into the light passing in a direction of substrate 7and the light reflected in a direction of reference mirror 32. The lightreflected from a surface of substrate 7 and the light reflected from asurface of reference mirror 32 join again in beam splitter 33 and aregathered by lens 31. Thereafter, the light having exited from lens 31passes through half mirror 37, and then, enters an image pick-up surface3 a of CCD camera 3 through an image-forming lens 38.

Normally, Mirau-type interference objective lens 39 is moved in anoptical axis direction using Z stage 8, to thereby generate an opticalpath length difference between the light reflected from the surface ofsubstrate 7 and the light reflected from the surface of reference mirror32. Then, an image of the interference light generated due to theabove-described optical path length difference is picked up by CCDcamera 3, with Mirau-type interference objective lens 39 being moved byZ stage 8. The intensity of this interference light, i.e., brightness ismaximized when the optical path length of the light reflected fromsubstrate 7 is equal to the optical path length of the light reflectedfrom reference mirror 32. In addition, the surface of substrate 7 is putinto focus at this time.

In addition to Z stage 8, substrate 7 itself may be moved up and downusing the table, or a piezo table may be attached to a coupling portionof Mirau-type interference objective lens 16 and observation opticalsystem 2 to thereby move up and down the position of Mirau-typeinterference objective lens 39.

Although the Mirau-type interference objective lens is used in thepresent embodiment, a Michelson-type or Riniku-type interferenceobjective lens may be used.

[Process for Measuring Volume]

FIG. 5 is a flowchart showing a procedure for measuring a volume of aliquid droplet in the embodiment of the present invention. Each step inthis flowchart is performed under control of control computer 11.

In step S101, a liquid material having adhered to the tip of applicationneedle 18 is applied onto substrate 7 and a liquid droplet is applied.Specifically, the liquid material having adhered to the tip ofapplication needle 18 is applied onto substrate 7 by ink applicationmechanism 5 of microscopic application apparatus 1 in FIG. 1.

In step S102, a three-dimensional shape of the liquid droplet ismeasured using white-light interferometry. Specifically, an image of theinterference light is picked up by CCD camera 3, with Mirau-typeinterference objective lens 39 being moved in the optical axis directionby Z stage 8, to thereby obtain a plurality of images. For each pixel inthe plurality of images, a position of Z stage 8 where the interferencelight intensity peaks is determined, to thereby detect a height of theliquid droplet.

Z stage 8 moves in the Z-axis direction at a predetermined speed v(μm/sec). The movement direction of the Z stage is shown by an arrow AR1in FIG. 4, and a direction of moving away from substrate 7 is definedas + direction and a direction of coming closer to substrate 7 isdefined as − direction. Herein, Z stage 8 is moved in the direction ofcoming closer to substrate 7 (− direction) from above substrate 7. Speedv (μm/sec) of Z stage 8 is set as follows. A center wavelength of thewhite light is represented by λ (μm) and a frequency of a verticalsynchronization signal of CCD camera 3 is represented by f (Hz). Then,movement speed v (μm/sec) is set such that Z stage 8 moves by λ/8 (m)during an image sampling cycle 1/f (sec). That is, movement speed v of Zstage 8 is expressed as v=(λ/8)×f (μm/sec). This movement speed vcorresponds to a phase increment of the white light of π/2. By changingthe phase in increments of π/2, a modulation contrast mi(x, y) of theinterference light in a (x, y) coordinate can be calculated inaccordance with the formula (2):

$\begin{matrix}{m_{i} = {\sqrt{\begin{matrix}{\left\{ {{g_{i - 1}\left( {x,y} \right)} - {g_{i + 1}\left( {x,y} \right)}} \right\}^{2} +} \\{\left\{ {{g_{i - 2}\left( {x,y} \right)} - {g_{i}\left( {x,y} \right)}} \right\} \left\{ {{g_{i}\left( {x,y} \right)} - {g_{i + 2}\left( {x,y} \right)}} \right\}}\end{matrix}}/2.}} & (2)\end{matrix}$

In the formula (2), i represents a frame number (image number). i is setto be not less than 1 and not more than ISIZE. That is, an image of thefirst frame to an image of the (ISIZE) frame are obtained.

gi(x, y) represents a pixel value, at the position (x, y), of an imageGi of the i frame taken by CCD camera 3. This pixel value indicates aluminance, at the position (x, y), of corresponding image pick-upsurface 3 a of the CCD camera, and corresponds to the interference lightintensity. In addition, modulation contrast mi(x, y) corresponds to anenvelope of the interference light intensity as shown in FIG. 6. xrepresents a position of the pixel in the X-axis direction, and yrepresents a position of the pixel in the Y-axis direction. x is set tobe not less than 1 and not more than XSIZE. y is set to be not less than1 and not more than YSIZE.

Since a peak of this envelope matches with a peak of the interferencelight intensity, the peak of the envelope is determined in step S102.However, when the ink is transparent, the interference light caused bythe light reflected from a rear surface of the ink is detected and theintensity of this interference light may in some cases be higher thanthe intensity of the interference light caused by the light reflectedfrom a front surface of the ink, and thus, the position of Z stage 8 atthe first detected peak of the envelope is determined.

Now, modulation contrast mi(x, y) at the position (x, y) is representedby a maximum value max(x, y). In addition, the number of times that doesnot continuously satisfy mi(x, y)>max(x, y) in step S206 described belowis represented by cnt(x, y).

An image in which the pixel value of the pixel (x, y) takes maximumvalue max(x, y) is defined as a contrast maximum image MAX.

A frame number i when modulation contrast mi(x, y) shows the maximumvalue in the pixel (x, y) is represented by id(x, y). An image in whichthe pixel value of the pixel (x, y) takes id(x, y) is defined as a framenumber image ID.

In addition, f(x, y)=1 is set when the peak is detected at the position(x, y), and f(x, y)=0 is set when the peak is not detected at theposition (x, y). An image in which the pixel value of the pixel (x, y)takes f(x, y) is defined as a detected identification image F.

FIGS. 7 and 8 are flowcharts showing a procedure for determining aposition (height) of Z stage 8 where the interference light intensitypeaks, using modulation contrast mi(x, y).

In step S200, for all x and y satisfying 1≤x≤XSIZE and 1≤y≤YSIZE, max(x,y)=0, cnt(x, y)=0, f(x, y)=0, and id(x, y)=−1 are set and i is set at 1.

In step S201, x is set at 1.

In step S202, y is set at 1.

In step S203, the process proceeds to step S204 when f(x, y)=1 issatisfied, and the process proceeds to step S211 when f(x, y)=0 issatisfied.

In step S204, modulation contrast mi(x, y) is calculated in accordancewith the formula (2).

In step S205, the process proceeds to step S206 when mi(x, y) is largerthan a prescribed threshold value T, and the process proceeds to stepS211 when mi(x, y) is equal to or smaller than prescribed thresholdvalue T.

In step S206, the process proceeds to step S207 when mi(x, y)>max(x, y)is satisfied, and the process proceeds to step S210 when mi(x, y)≤max(x,y) is satisfied.

In step S207, when S>cnt(x, y) is not satisfied, the process proceeds tostep S211 and max(x, y) is not updated. That is, maximum value max(x, y)of the pixel (x, y) is confirmed.

In step S207, when S≤cnt(x, y) is satisfied, the process proceeds tostep S208.

In step S208, cnt(x, y)=0 is set, and then, the process proceeds to stepS209.

In step S209, max(x, y) is set at the value of mi(x, y), id(x, y) is setat the value of i, and f(x, y) is set at 1.

In step S210, cnt(x, y) is incremented by 1, and then, the processproceeds to step S211.

In step S211, the process proceeds to step S212 when y=YSIZE issatisfied, and the process proceeds to step S213 when y=YSIZE is notsatisfied.

In step S212, y is incremented by 1. Thereafter, the process returns tostep S203.

In step S213, the process proceeds to step S215 when x=XSIZE issatisfied, and the process proceeds to step S214 when x=XSIZE is notsatisfied.

In step S214, x is incremented by 1. Thereafter, the process returns tostep S202.

In step S215, the process proceeds to step S217 when i=ISIZE issatisfied, and the process proceeds to step S216 when i=ISIZE is notsatisfied.

In step S216, i is incremented by 1. Thereafter, the process returns tostep S201.

As a result of the above-described process, modulation contrast mi(x, y)of the first detected peak of the envelope is stored in the pixel (x, y)satisfying f(x, y)=1, of contrast maximum image MAX. Number id(x, y) ofthe first detected peak of the envelope is stored in frame number imageID.

In step S217, with a position of Z stage 8 when an image having framenumber i of “1” is obtained being the point of origin, a position(height) h(x, y) of Z stage 8 where the interference light intensity ismaximized is calculated in accordance with id(x, y)×λ/8 (μm). An imagein which the pixel value of the pixel (x, y) takes height h(x, y) isdefined as a height image H.

Referring again to FIG. 5, in step S103, a height at which the firstintensity peak of the interference light is detected is compared with areference plane, and a liquid droplet top portion is thereby extracted.

Specifically, as shown in FIG. 9, N areas forming the reference plane inheight image H is represented by Si (i=1 to N), and an area includingthe liquid droplet top is represented by A. Area A and areas Si (i=1 toN) are predetermined by the operator with reference to the imagedisplayed on monitor 12, and coordinate values thereof are stored incontrol computer 11.

Control computer 11 extracts the pixels satisfying f(x, y)=1 from thepixels included in areas S1 to SN, and calculates an average value ofheights h(x, y) of the extracted pixels as an average height havg of thereference plane. In addition, control computer 11 extracts the pixelssatisfying f(x, y)=1 from the pixels included in area A, and extractsthe pixels whose heights h(x, y) satisfy h(x, y)>havg+Δh as the liquiddroplet top portion. The extracted liquid droplet top portion is shownin FIG. 11(A). Δh is a value prestored in control computer 11 andadjusted so as to allow extraction of the liquid droplet top portion bya preliminary test and the like.

In step S104, a height of a top of the liquid droplet top portionextracted in step S103 is detected.

Specifically, control computer 11 extracts a pixel (xp, yp) havingmaximum h(x, y) as the top, of the pixels of the liquid droplet topportion extracted in step S103, and subtracts average height havg of thereference plane from a height h(xp, yp) as shown in FIG. 10, to therebycalculate a top height hp.

In step S105, an average of a lateral dimension and a longitudinaldimension of a circumscribed quadrangle in an area is detected as adiameter, the area constituting the liquid droplet top portion and anunmeasured portion including or being in contact with the liquid droplettop portion.

Specifically, control computer 11 creates an image C shown in FIG.11(A). A pixel value c(x, y) of image C at the position (x, y) is set at“1” when height h(x, y) of the pixel (x, y) satisfies h(x, y)>havg+Δh(Δh>0), and is otherwise set at “0”.

In addition, control computer 11 sets a pixel value f(x, y) of an imageF shown in FIG. 11(B) at “1” when modulation contrast mi of the pixel(x, y) exceeds threshold value T, and otherwise sets pixel value f(x, y)at “0”.

The process when modulation contrast mi falls below threshold value Twith regard to image F will now be described with reference to FIG. 13.In FIG. 13, the horizontal axis represents an x coordinate of a pixel,and the vertical axis in the upper part represents pixel height h(x, y)and the vertical axis in the lower part represents pixel value f(x, y).

An outer circumferential portion of the liquid droplet having a crosssection shown in FIG. 10 that comes into contact with the substrate hasa high ink surface tension, and has a higher curvature than that of aliquid droplet central portion. Most of the light applied to thelocation having a high curvature is not reflected in the optical axisdirection of the objective lenses, and thus, a generated interferencefringe has low contrast.

Therefore, in the outer circumferential portion of the liquid droplet,modulation contrast mi falls below threshold value T, and pixel valuef(x, y) is “0” as shown in a section x1 to x2 and a section x3 to x4 inFIG. 13. As a result, in the outer circumferential portion indicated bythe section x1 to x2 and the section x3 to x4, pixel height h is notobtained as shown in the upper part in FIG. 13.

In FIG. 13, x1 and x4 can be regarded as a position where the liquiddroplet comes into contact with the substrate, i.e., the outercircumference of the liquid droplet. Therefore, a distance between x1and x4 corresponds to diameter D of the liquid droplet.

Control computer 11 creates an image I shown in FIG. 11(C), using imageC shown in FIG. 11(A) and image F shown in FIG. 11(B).

A pixel value i(x, y) of image I at the position (x, y) is set at “1”when c(x, y)=1 is satisfied or when c(x, y)=0 and f(x, y)=0 aresatisfied, and is otherwise set at “0”. In FIGS. 11(A) to (C), thepixels having the pixel value of “1” are indicated by white color andthe pixels having the pixel value of “0” are indicated by black color.

Control computer 11 couples the pixels having the pixel value of “1” inimage I and obtains a circumscribed quadrangle thereof. Control computer11 calculates an average value of a lateral dimension H of thecircumscribed quadrangle and a longitudinal dimension V of thecircumscribed quadrangle as diameter D.

In step S106, volume Vol of the liquid droplet, top height hp of theliquid droplet and radius R (=D/2) of the liquid droplet have a relationshown in FIG. 12, and thus, control computer 11 substitutes top heighthp detected in step S104 and radius R calculated from diameter Ddetected in step S105 into the formula (1), to thereby calculate volumeVol of the liquid droplet:

Vol=(⅙)π×hp×(3R ² +hp ²)  (1).

When the formula (1) is expressed using diameter D, the formula (1) canbe expressed like the following formula (2), using the relation ofR=D/2:

Vol=(⅙)π×hp×{(¾)D ² +hp ²}  (2).

As described above, according to the present embodiment, even when theheight cannot be detected because a contact angle is large at an edge ofthe ink and no interference fringe occurs due to a high viscosity ink,diameter D can be obtained. Therefore, the volume of the liquid dropletof the ink can be calculated.

When the substrate is made of a metal having a high reflectivity and thelike, the light transmitted through the liquid droplet and reflectedfrom the rear surface (i.e., substrate surface) is strong. Therefore, inthe section x1 to x2 and the section x3 to x4 shown in FIG. 13 as well,the interference fringe may have high contrast. In such a case, pixelvalue f(x, y) and pixel height h(x, y) in the cross section of theliquid droplet is as shown in FIG. 14. That is, in the section x1 to x2and the section x3 to x4 as well, modulation contrast mi exceedsthreshold value T and f(x, y)=1 is satisfied, and thus, the pixel heightcan be obtained.

However, a distance of the light traveling through the liquid droplet isgenerally longer than a distance of the light traveling in the air dueto an influence of a refractive index of the ink. Therefore, the pixelheight in the section x1 to x2 and the section x3 to x4 is detected tobe lower than the actual height of the substrate surface (referenceplane) as shown in the upper part in FIG. 14. In such a case, diameter Dof the liquid droplet is calculated using the method described below.

Specifically, control computer 11 creates an image C shown in FIG.15(A). A pixel value c(x, y) of image C at the position (x, y) is set at“1” when height h(x, y) of the pixel (x, y) satisfies h(x, y)>havg+Δh(Δh>0), and is otherwise set at “0”.

As to an image F shown in FIG. 15(B), a pixel value f(x, y) is changedto 0 when pixel value f(x, y) satisfies f(x, y)=1 and pixel height h(x,y) satisfies h(x, y)<havg−Δh2 (Δh2>0). Δh2 is a value prestored incontrol computer 11 and adjusted so as to allow extraction of the targetarea by a preliminary test and the like.

Control computer 11 creates an image I shown in FIG. 15(C), using imageC shown in FIG. 15(A) and image F shown in FIG. 15(B). A pixel valuei(x, y) of image I at the position (x, y) is set at “1” when c(x, y)=1is satisfied or when c(x, y)=0 and f(x, y)=1 are satisfied, and isotherwise set at “0”. In FIGS. 15(A) to (C), the pixels having the pixelvalue of “1” are indicated by white color and the pixels having thepixel value of “0” are indicated by black color.

Control computer 11 couples the pixels having the pixel value of “1” inimage I and obtains a circumscribed quadrangle thereof. Control computer11 calculates an average value of a lateral dimension H of thecircumscribed quadrangle and a longitudinal dimension V of thecircumscribed quadrangle as diameter D. Thereafter, the volume of theliquid droplet of the ink is calculated using the formula (1) or theformula (2), as described above.

(Modification)

The present invention is not limited to the above-described embodiment,and also includes, for example, a modification described below.

(1) Top Height

Although control computer 11 extracts the pixel (xp, yp) having maximumh(x, y) as the top and subtracts average height havg of the referenceplane from height h(xp, yp), to thereby calculate top height hp in theabove-described embodiment, the present invention is not limitedthereto.

For example, control computer 11 may extract the pixel (xp, yp) havingmaximum h(x, y) as the top and subtract average height havg of thereference plane from an average value or a median value (median) of thepixel of the top and nearby pixels centered at the top, to therebycalculate top height hp. The size of the nearby pixels may be set at,for example, k (k≥3) pixels in the X direction and l (l≥3) pixels in theY direction.

(2) Diameter D

Although control computer 11 uses the average value of H and V asdiameter D in the above-described embodiment, the present invention isnot limited thereto. Control computer 11 may use H as diameter D, or mayuse V as diameter D.

Vol calculated as described above is compared with a threshold valueT_(v), and when Vol<T_(v) is satisfied, the ink is applied again. Thisoperation is performed until Vol≥T_(v) is satisfied. As a result, aprescribed ink volume can be ensured. However, when the number of timesof application of the ink exceeds the specified number of times N_(v),the process is suspended and an alarm buzzer is sounded to inform theoperator.

The operator checks the applied portion through monitor 12. For example,two points on monitor 12 are specified with a mouse to measure diameterD of the applied ink, and when diameter D is larger than a prescribedvalue, the applied ink is completely removed using cutting laser device4. Thereafter, the ink application operation is restarted again.

It should be understood that the embodiment disclosed herein isillustrative and non-restrictive in every respect. The scope of thepresent invention is defined by the terms of the claims, rather than thedescription above, and is intended to include any modifications withinthe scope and meaning equivalent to the terms of the claims.

REFERENCE SIGNS LIST

1 microscopic application apparatus; 2 observation optical system; 2 aobservation lens barrel; 3 CCD camera; 4 cutting laser device; 5 inkapplication mechanism; 6 light source for ink curing; 7 liquid crystalcolor filter substrate; 8 Z stage; 9 X stage; 10 Y stage; 11 controlcomputer; 12 monitor; 13 operation panel; 15 movable plate; 16 objectivelens; 17 application unit; 18 application needle; 19 ink tank; 31 lens;32 reference mirror; 33 beam splitter; 34 incident light source; 35filter switching device; 36 filter; 37 half mirror; 38 image-forminglens; 39 Mirau-type interference objective lens.

1. A method of measuring a volume of a micro projection, the methodcomprising: measuring a three-dimensional shape of the micro projectionusing white-light interferometry; calculating a height of a referenceplane using a height measured in the measuring the three-dimensionalshape; extracting a portion higher than the reference plane as aprojection top portion of the micro projection; detecting a height ofthe extracted projection top portion; detecting, as a diameter, any oneof a lateral dimension, a longitudinal dimension, and an average of thelateral dimension and the longitudinal dimension of a circumscribedquadrangle in an area that constitutes the projection top portion and aregion having a height different from the height of the reference plane,the region including or being in contact with the projection topportion; and calculating the volume of the micro projection based on theheight of the projection top portion and the diameter.
 2. The method ofmeasuring a volume of a micro projection according to claim 1, whereinthe region having the height different from the height of the referenceplane is a height-undetected portion including or being in contact withthe projection top portion.
 3. The method of measuring a volume of amicro projection according to claim 1, wherein the region having theheight different from the height of the reference plane is aheight-detected portion lower than the reference plane, theheight-detected portion including the projection top portion.
 4. Themethod of measuring a volume of a micro projection according to claim 1,wherein the detecting the height includes detecting a maximum height ofthe projection top portion as the height of the projection top portion.5. The method of measuring a volume of a micro projection according toclaim 1, wherein the detecting the height includes detecting, as theheight of the projection top portion, an average height or a medianvalue of a highest portion of the projection top portion and a portionnear the highest portion.
 6. The method of measuring a volume of a microprojection according to claim 1, wherein the micro projection is aliquid droplet adhering to a substrate.
 7. The method of measuring avolume of a micro projection according to claim 6, wherein the liquiddroplet is a liquid droplet formed on the substrate by any one of anapplication needle, an ink jet and a dispenser.
 8. A method of applyinga liquid material, by causing a liquid material to adhere to a tipportion of an application needle, arranging the application needle at apredetermined position above an object, moving down and up theapplication needle and applying the liquid material onto the object, toform a liquid material layer made of the liquid material, the methodcomprising: measuring a three-dimensional shape of a micro projectionusing white-light interferometry; comparing a height at which a firstpeak of an envelope of an interference light intensity is detected witha height of a reference plane, to extract a portion higher than thereference plane as a projection top portion of the micro projection;detecting a height of the extracted projection top portion; detecting,as a diameter, any one of a lateral dimension, a longitudinal dimension,and an average of the lateral dimension and the longitudinal dimensionof a circumscribed quadrangle in an area that constitutes the projectiontop portion and a region having a height different from the height ofthe reference plane, the region including or being in contact with theprojection top portion; calculating a volume of the micro projectionbased on the height of the projection top portion and the diameter; andwhen the volume calculated in the calculating the volume of the microprojection is smaller than a threshold value, repeatedly applying theliquid material until the number of times of application exceeds thespecified number of times.
 9. The method of measuring a volume of amicro projection according to claim 2, wherein the detecting the heightincludes detecting a maximum height of the projection top portion as theheight of the projection top portion.
 10. The method of measuring avolume of a micro projection according to claim 3, wherein the detectingthe height includes detecting a maximum height of the projection topportion as the height of the projection top portion.
 11. The method ofmeasuring a volume of a micro projection according to claim 2, whereinthe detecting the height includes detecting, as the height of theprojection top portion, an average height or a median value of a highestportion of the projection top portion and a portion near the highestportion.
 12. The method of measuring a volume of a micro projectionaccording to claim 3, wherein the detecting the height includesdetecting, as the height of the projection top portion, an averageheight or a median value of a highest portion of the projection topportion and a portion near the highest portion.
 13. The method ofmeasuring a volume of a micro projection according to claim 2, whereinthe micro projection is a liquid droplet adhering to a substrate. 14.The method of measuring a volume of a micro projection according toclaim 3, wherein the micro projection is a liquid droplet adhering to asubstrate.
 15. The method of measuring a volume of a micro projectionaccording to claim 4, wherein the micro projection is a liquid dropletadhering to a substrate.
 16. The method of measuring a volume of a microprojection according to claim 5, wherein the micro projection is aliquid droplet adhering to a substrate.